Effects of Trace Metals (Impurities) in Chemicals Used in Semiconductor Manufacture and Their Analysis
The original article by Yukihisa Kawada of the FUJIFILM Corporation, appeared in an e-newsletter of FUJIFILM Wako Pure Chemical Corporation and was translated by the company.
In recent years, the manufacturing process for semiconductors has become increasingly complex in order to meet the technical requirements for smaller size and higher performance. In this situation, qu...